Table 1.

Physical significance of motor shaft movement of the equipment under test.

Optical	Motors	Physical Function
Slit2	X1,X2 Z1,Z2	Adjust the knife size of the through light in the X and Z directions
DMM	Pitch	Adjust the pitch angle of 2nd crystal
	Roll	Adjust the roll angle of 2nd crystal
PFM	m1,m2	Adjust the pitch angle of the mirror