Table 3.
Order | Optimized Device | Initial State | Optimization Time (S) | Position Deviation (μm) | Flux (10−6 A) |
---|---|---|---|---|---|
1 | Slit2 (X1,X2,Z1,Z2) | Random | 506 | 150.18 | 7.23 |
2 | Slit2 (X1,X2,Z1,Z2) | Experience | 530 | 34.81 | 9.11 |
3 | DMM (Pitch,Roll) | Random | 135 | 54.90 | 5.27 |
4 | DMM (Pitch,Roll) | Experience | 179 | 42.80 | 5.55 |