Table 4.

Parameters of CaPs determined by AFM.

Sample *	Without Cooling	With Cooling
P, nm	910 ± 120	1210 ± 120
S × 103, nm2	50 ± 13	90 ± 20
RMS, nm	7 ± 1	11 ± 1
FF 1	0.06 ± 0.02	0.09 ± 0.02
FF 2	0.8 ± 0.2	0.63 ± 0.3
H, nm	35 ± 7	44 ± 7

* The measurements were carried out on a sample of more than 10 particles separately located on the substrate. P—perimeter, length of an object’s border in the XY plane; S—area occupied by an object in the projection onto the XY plane; RMS—root mean square value of an object height (roughness); H—maximal height of an object. Form factor 1 (FF1)—the ratio of the radius of a circle of equivalent area to the radius of a circle of equivalent perimeter. For a round object, this form factor is equal to one. The more jagged the perimeter of an object, the closer its value is to zero. Form factor 2 (FF2)—the ratio of twice the length of an object’s skeleton to its perimeter. For a thin thread this ratio is equal to one, for a circle it is equal to zero.