Table 1. Experimental conditions for ALD trials using (mes)W(CO)₃.

Run	Chamber temp. (°C)	Line temp. (°C)	Ampoule temp. (°C)	Pulse time (s)	Oxidant (pulse time, s)
1	175	120	80	0.06	300 W O2 plasma (4)
2	175	120	80	0.10	300 W O2 plasma (4)
3	175	120	100	0.06	300 W O2 plasma (4)
4	175	120	100	0.06	80 sccm O2 (10)
5	175	120	100	0.06	H2O (0.06)
6	175	150	120	0.06	H2O (0.06)
7	175	150	120	0.12	H2O (0.06)
a8	175	150	120	0.12	H2O (0.06)
a9	175	150	120	0.5	50 W O2 plasma (4)
a10	175	150	120	0.5	25 W O2 plasma (4)
a11	225	150	120	0.5	25 W O2 plasma (4)
a12	225	150	140	0.5	25 W O2 plasma (4)

^a(8–12) note long form process over 50 cycles using standard alternating pulses of precursor, purge and oxidant, the remaining (1–7) were conducted for ×10 TTT as described in the text.