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Effect of the grating. (A, B) SEM image of the grating-integrated microring with R = 25 μm: (A) total image of microring, and (B) the grating structure with depth dg = −85 nm, period Λ = 294.16 nm, and duty cycle σ = 0.2. (C) Schematic of the effect of the grating on the radial waveguide mode and the WGM. (D) Excitation image with R = 10 μm and dg = −25 nm with focus risen in z-axis.
