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Various O2 flow rates with properties of ITO thin films [42].
| Flow Rate of Oxygen (sccm) |
Sheet Resistance (Ω/sq.) |
Resistivity (10−4 Ω cm) |
Transmittance (%) |
Root-Mean-Square Surface Roughness) RMSSR (nm) | Bandgap (eV) | Figure of Merit (10−4 Ω−1) |
|---|---|---|---|---|---|---|
| 8 | 130 | 15.6 | 75 | 0.52 | 4.15 | 4.33 |
| 10 | 74 | 8.9 | 82 | 0.74 | 4.17 | 18.57 |
| 12 | 60 | 7.2 | 84 | 0.93 | 4.19 | 29.15 |
| 14 | 84 | 10.1 | 80 | 0.38 | 4.16 | 12.78 |
