| UHPE | Ultrahigh-precision engineering |
| SM | Smart material |
| PM | Piezoelectric material |
| PET | Piezoelectric transducer |
| PEA | Piezoelectric actuator |
| PEH | Piezoelectric harvester |
| PES | Piezoelectric sensor |
| CM | Compliant mechanism |
| PECD | Piezoelectric compliant device |
| PZT | Lead zirconate titanate |
| MFC | Macro fiber composites |
| PVDF | Polyvinylidene difluoride |
| PVDC | Polyvinylidene chloride |
| MEMS | tMicroelectromechanical systems |
| PRBM | Pseudo-rigid-body method |
| CMM | Compliance matrix method |
| EIM | Elliptic integral method |
| CBCM | Chained beam constraint model |
| FEA | Finite element analysis |
| LBA | Linkage-based amplifier |
| FBA | Flextension-based amplifier |
| DOF | Degree-of-freedom |
| LBG | Linkage-based guider |
| FBG | Flexure-based guider |
| CFM | Constant force mechanism |
| MIMO | Multi-input multi-output |
| SISO | Single-input single-output |