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. 2024 Dec 30;15:10798. doi: 10.1038/s41467-024-54707-y

Fig. 4. Temperature stability and service features of self-poled Pb(Zr,Ti)O3 (PZT) films.

Fig. 4

a Temperature-dependence of d33,d in self-poled PZT films. b d33,d after different numbers of heating and cooling cycles to 400 °C (above its depolarization temperature). The data in this study are for 4 μm-thick PZT films. The error bars represent different measurements. c Piezoelectric property variation versus in situ heat treatment temperature, comparing the current film to other ferroelectric films. The comparison involves piezoelectricity described by parameters such as d33,d, d31, or -e31, since d33,d is yet to be investigated in many ferroelectric thin films. d d33,d achieved in self-poled PZT films compared to other representative ferroelectric films. Notably, the graph exclusively features ferroelectric films and the small signal direct piezoelectric charge coefficient, d33,d. The abbreviations PVDF, BTO, BFO, KNN, PMN, and PMnN denote polyvinylidene difluoride, BaTiO3, BiFeO3, (K,Na)NbO3, Pb(Mg, Nb)O3, and Pb(Mn, Nb)O3, respectively.