Table 1. Values of Re, δ, K, and C Deposition Rate under Different Ar Flow Rates.

	500 sccm	300 sccm	200 sccm
V (m/s)	0.014	0.013	0.012
Re	19.31	17.77	16.23
δ (cm)	3.03	3.16	3.31
K (s–1)	0.108	0.096	0.083
C deposition rate (kg s–1 m–2)	1.3 × 10–8	1.7 × 10–8	1.8 × 10–8