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The relationship between the target product temperature (Tp), the vapor pressure of ice pressure at sublimation interference (Pice), and the selected chamber pressure (Pc).
| Tp (°C) | Pice (mTorr) | Selected Pc (mTorr) |
|---|---|---|
| −10 | 2000 | 200 |
| −15 | 1200 | 150 |
| −20 | 770 | 120 |
| −25 | 470 | 100 |
| −30 | 290 | 80 |
| −35 | 170 | 60 |
| −40 | 96 | 50 |
