Table 2.

Comparison of the developed resonators and filters with the existing state-of-the-art

Reference	P3F material	Fully CMOS compatible	Resonator performance							Filter
			Freq. (GHz)	A/p ratio	Type	Qs	Qp	$k_t^2$ (%)	${\mathrm{FoM}}_1$	IL (dB)	BW (%)	Rejection (dB)	IIP3 (dBm)
Lu et al.35	LiNbO3	Non-CMOS	19.5	29	–	NR	445	1.26	5.6	7.86	0.21	–	–
Kramer et al.17	LiNbO3	Non-CMOS	19.2	–	–	55	–	40	22	–	–	–	–
Barrera et al.16	LiNbO3	Non-CMOS	19.8	–	Shunt	40	–	44	17.6	2.38	18.2	13	8
Barrera et al.36	LiNbO3	Non-CMOS	38.2	–	Shunt	13	–	30	38.7	5.63	17.6	10.2	–
Mo et al.18	AlScN	CMOS	13.9	–	Series	151	NR	10.7	16.2	–	–	–	–
Kochhar et al.20	AlScN	CMOS	10.72	–	Shunt	347	789	10	79	0.7	4.7	6	–
Izhar et el.21	AlScN	CMOS	20	16	Series	92	160	8.23	13.2	–	–	–	–
Vetury et al.19	AlScN	CMOS	18.4	–	Series	180	260	7.6	20	–	–	–	–
Schaffer et al.37	AlN	CMOS	55.7	2.7	Series	93	89	2.2	2.1	–	–	–	–
Cho et al.38	AlScN	CMOS	21	2.3	Series	62	32	6.4	2.1	–	–	–	–
	AlScN	CMOS	55.4	2.3	Series	30	27	3.8	1.1	–	–	–	–
This work	AlScN	CMOS	17.4	22.2	Series	58.4	236.6	11.8	27.9	3.25	3.4	16.6	>40 dBm