| Al NPs | Aluminum nanoparticles |
| AlCl3 | Aluminum trichloride |
| Al–SiO2 | Aluminum–silica core–shell nanoparticles |
| Ar | Argon gas |
| a-Si | Amorphous silicon |
| At.% | Atomic percent |
| CCP | Capacitively coupled plasma |
| c-Si | Crystalline silicon |
| DSC | Differential scanning calorimetry |
| EDS | Energy-dispersive X-ray spectroscopy |
| FTIR | Fourier-transform infrared spectroscopy |
| H2 | Hydrogen gas |
| HAADF | High-angle annular dark field |
| RF | Radiofrequency |
| Si NPs | Silicon nanoparticles |
| Si–Al2O3 | Silicon–alumina core–shell nanoparticles |
| SiH4 | Silane gas |
| STEM | Scanning transmission electron microscopy |
| TEM | Transmission electron microscopy |
| TGA | Thermogravimetric analysis |
| Wt. % | Weight percent |
| XPS | X-ray photoelectron spectroscopy |
| XRD | X-ray diffraction |
| μg | Geometric mean diameter |
| σg | Geometric standard deviation |