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. 2025 Feb 4;15(3):237. doi: 10.3390/nano15030237
Al NPs Aluminum nanoparticles
AlCl3 Aluminum trichloride
Al–SiO2 Aluminum–silica core–shell nanoparticles
Ar Argon gas
a-Si Amorphous silicon
At.% Atomic percent
CCP Capacitively coupled plasma
c-Si Crystalline silicon
DSC Differential scanning calorimetry
EDS Energy-dispersive X-ray spectroscopy
FTIR Fourier-transform infrared spectroscopy
H2 Hydrogen gas
HAADF High-angle annular dark field
RF Radiofrequency
Si NPs Silicon nanoparticles
Si–Al2O3 Silicon–alumina core–shell nanoparticles
SiH4 Silane gas
STEM Scanning transmission electron microscopy
TEM Transmission electron microscopy
TGA Thermogravimetric analysis
Wt. % Weight percent
XPS X-ray photoelectron spectroscopy
XRD X-ray diffraction
μg Geometric mean diameter
σg Geometric standard deviation