| Feature | Specification |
| Type | Field-Emission Scanning Electron Microscope (FE-SEM) |
| Electron Source | Schottky Field Emission |
| X-ray Detector | Single Silicon Drift Detector (SDD) |
| Feature | Specification |
| Type | Field-Emission Scanning Electron Microscope (FE-SEM) |
| Electron Source | Schottky Field Emission |
| X-ray Detector | Single Silicon Drift Detector (SDD) |