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RMS and Ra roughness, maximum Tensile Strength, and Knoop Hardness of ClMPc films.
| Film | RMS (nm) | Ra (nm) | σmax (Pa) | HK |
|---|---|---|---|---|
| TiPcCl2 | 8.352 | 6.68 | 1.8x10−4 | 15.02 |
| MnPcCl | 5.694 | 4.3 | 1.5x10−4 | 14.95 |
| InPcCl | 77.39 | 61.43 | 9.3x10−3 | 10.76 |
| AlPcCl | 14.38 | 8.83 | 1.5x10−4 | 15.19 |
