Table 2.
Characteristics of various laser-based processes for HMN manufacturing.
| Method | Parameter (μm) | HMN Materials | Pros | Cons | Ref. |
|---|---|---|---|---|---|
| Laser Micromachining | Shapes: cone, pyramid | Nickel, Polyetheretherketone (PEEK), Stainless steel | High precision, minimal thermal damage, applicable to various materials | High cost, slow processing speed, complex process | [88,90,91] |
| Heights: 250-1000 | |||||
| Hollow diameter: 40–100 | |||||
| Laser Writing | Shapes: cone, cylinder, syringe, pyramid | Polymethyl Methacrylate (PMMA), Negative PR (SU-8, IP-S), polymer precursor (E-shell 300), UV sensitive hybrid material (US-S4) |
Precise pattern formation, non-contact, high-speed processing capability | Limitations in processing multi-layer structures, material selection, precision limitations | [87,[92], [93], [94], [95], [96], [97]] |
| Heights: 100-2000 | |||||
| Hollow diameter: 15-200 | |||||
| Laser Drilling | Shapes: cone, syringe, pyramid | Stainless steel, polyethylene terephthalate (Mylar), polycarbonate (PC), polymethyl methacrylate (PMMA), polymer | High-speed processing, micro hole creation capability, adjustable for various depths | Thermal damage, uniformity issues, uneven roughness | [[99], [100], [101], [102], [103], [104]] |
| Heights: 50-1700 | |||||
| Hollow diameter: 50-1054 | |||||
| Laser Cutting | Shapes: cone, syringe, pyramid | Negative PR (SU-8), Nickel, Hyaluronic acid | Fast cutting, precise cutting capability | Thermal damage, limited to thick/reflective materials | [[106], [107], [108], [109], [110]] |
| Heights: 720–2000 | |||||
| Hollow diameter: 20-50 |