Table 2.
Characteristics and uncertainties of the measurement instruments.
| Measurement | Range | Error |
|---|---|---|
|
| ||
| Temperature | 77–300 K | ±0.1 K |
| Pressure | 0–1 MPa | ±0.5% |
| Mass flow rate | 0–500 sccm | ±0.5% |
| Total uncertainty | ~7% | |
Characteristics and uncertainties of the measurement instruments.
| Measurement | Range | Error |
|---|---|---|
|
| ||
| Temperature | 77–300 K | ±0.1 K |
| Pressure | 0–1 MPa | ±0.5% |
| Mass flow rate | 0–500 sccm | ±0.5% |
| Total uncertainty | ~7% | |