| U11 | U22 | U33 | U12 | U13 | U23 | |
| Cl1 | 0.02614 (19) | 0.0226 (2) | 0.01572 (18) | −0.00771 (14) | 0.00426 (13) | −0.00293 (12) |
| Cl2 | 0.02389 (19) | 0.01773 (19) | 0.0245 (2) | 0.00268 (13) | 0.00429 (14) | 0.00032 (13) |
| F1 | 0.0255 (5) | 0.0325 (6) | 0.0395 (6) | −0.0097 (4) | 0.0100 (4) | 0.0007 (5) |
| O2 | 0.0221 (5) | 0.0199 (6) | 0.0272 (6) | −0.0036 (4) | 0.0059 (4) | −0.0061 (4) |
| O4 | 0.0204 (5) | 0.0172 (5) | 0.0271 (6) | −0.0031 (4) | 0.0057 (4) | −0.0057 (4) |
| O6 | 0.0226 (5) | 0.0229 (6) | 0.0188 (5) | 0.0006 (4) | 0.0023 (4) | 0.0011 (4) |
| N1 | 0.0359 (8) | 0.0167 (7) | 0.0321 (8) | −0.0040 (6) | 0.0103 (6) | −0.0020 (6) |
| N3 | 0.0285 (7) | 0.0174 (7) | 0.0200 (6) | −0.0056 (5) | 0.0046 (5) | −0.0023 (5) |
| C2 | 0.0147 (6) | 0.0177 (7) | 0.0281 (8) | −0.0015 (5) | 0.0041 (6) | −0.0038 (6) |
| C4 | 0.0219 (7) | 0.0151 (7) | 0.0210 (7) | −0.0024 (6) | 0.0043 (5) | −0.0024 (6) |
| C5 | 0.0214 (7) | 0.0158 (7) | 0.0171 (6) | −0.0011 (6) | 0.0029 (5) | −0.0017 (5) |
| C6 | 0.0215 (7) | 0.0160 (7) | 0.0164 (7) | 0.0001 (5) | 0.0057 (5) | −0.0024 (5) |
| C7 | 0.0218 (7) | 0.0165 (7) | 0.0186 (7) | −0.0008 (6) | 0.0063 (5) | −0.0019 (5) |
| C8 | 0.0239 (7) | 0.0211 (7) | 0.0204 (7) | −0.0011 (6) | 0.0045 (6) | 0.0014 (6) |
| C9 | 0.0219 (7) | 0.0254 (8) | 0.0237 (7) | −0.0007 (6) | 0.0042 (6) | −0.0014 (6) |
| C10 | 0.0236 (7) | 0.0207 (8) | 0.0285 (8) | −0.0058 (6) | 0.0093 (6) | −0.0045 (6) |
| C11 | 0.0297 (8) | 0.0227 (8) | 0.0269 (8) | −0.0032 (7) | 0.0088 (6) | 0.0052 (6) |
| C12 | 0.0233 (7) | 0.0210 (8) | 0.0231 (7) | −0.0001 (6) | 0.0040 (6) | 0.0028 (6) |
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