Fig. 3. Demonstration of x-ray source switching in a confined measurement spot.

(A) Camera picture of the nozzle and gold patterned silicon sample. (B) Schematic of the gold patterned silicon sample, the red dot between the gold grids indicating the measurement spot. (C) Au 4d spectrum, linear background subtracted and normalized. (D) Si 2p spectrum, Shirley background subtracted and normalized. Spectra were measured with a step of 0.2 eV, a dwell time of 0.2 s, a pass energy of 90 eV, and a nominal spot size of 100 μm. One, four, and eight scans are used of the respective Al Kα, Ag Lα, and Cr Kα excitations. arb. u., arbitrary units.