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. 2025 Aug 22;15:30978. doi: 10.1038/s41598-025-17058-2

Table 2.

Different orientations of Cu-Cu direct bonding interfaces at different bonding temperatures.

Temperature(℃) 110 115 120 125 130 135 140 145 150

Major orientation

in X-direction

{101}

{203}

{313}

{556}

{112}

{111}

{102}

{115}

 {115}

{001}

{102}

{323}

{112}

{115}

{101}

{001}

{111}

{001}

{111}

{000}

{111}

{001}
Major orientation in Y-direction

{112}

{115}

{212}

{203}

{101}

{213}

{203}

{001}

{313}

{618}

 {102}

{112}

{115}

 {101} {101} {101}
Minor orientation in Y-direction

{111}

{313}

 {112}

{112}

{115}