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. 2025 Aug 23;15:31060. doi: 10.1038/s41598-025-16731-w

Table 6.

Sensitivity analysis of the absorber in terms of fabrication tolerances (oblique incidence case).

Perturbation Inline graphic Inline graphic Inline graphic Inline graphic Inline graphic Inline graphic Inline graphic Inline graphic
Angular stability up to 70o X ✔ ✔ ✔ ✔ ✔ ✔ X

+/-: increment/decrement of the parameter by 5 nm.