RS	Resistive switching
MIM	Metal–Insulator–Metal
RRAM	Resistive random-access memory
CMOS	Complementary Metal-Oxide-Semiconductor
SRAM	Static random-access memory
DRAM	Dynamic random-access memory
XPS	X-ray photoelectron spectroscopy
XRD	X-ray diffraction
MRAM	Magnetic random-access memory
PCM	Phase-change memory
FeRAM	Ferroelectric random-access memory
HRS	High-resistive state
LRS	Low-resistive state
BEOL	Back-end of line
BE	Bottom electrode
TE	Top electrode
PVD	Physical Vapor Deposition
sccm	standard cubic centimeter
Re(ε)	Real part of relative permittivity
DI	deionized
BE	Binding Energy
C2C	Cycle to cycle
D2D	Device to device