| ZnO | Zinc Oxide |
| RE | Rare-Earth |
| La | Lanthanum |
| Er | Erbium |
| Sm | Samarium |
| XRD | X-ray Diffraction |
| SEM | Scanning Electron Microscopy |
| EDX | Energy Dispersive X-ray Spectroscopy |
| UV–Vis | Ultraviolet–Visible Spectroscopy |
| PL | Photoluminescence |
| Eg | Optical Bandgap Energy |
| λ | Wavelength |
| D | Crystallite Size |
| ε | Microstrain |
| δ | Dislocation Density |
| τZnO | Crystallite Size of ZnO phase from Rietveld refinement |
| τsecondary | Crystallite Size of Secondary Phase |
| εZnO | Microstrain of ZnO phase from Rietveld refinement |
| εsecondary | Microstrain of Secondary Phase |
| nm | Nanometer |
| eV | Electron Volt |
| at.% | Atomic Percent |
| Tauc plot | Graphical Method to Estimate Bandgap from UV–Vis Absorption |
| O2 | Molecular Oxygen |
| RE:ZnO | Rare-Earth-Doped ZnO Thin Film |