3D-DRAM	3D Dynamic random-access memory
CFET	Complementary field effect transistor
GAA	Gate-all-around
ICP-RIE	Inductively coupled plasma reactive ion etching
MFP	Mean free path
ML	Multilayer
sccm	Standard cubic centimeters per minute
SEM	Scanning electron microscopy
XPS	X-ray photoelectron spectroscopy