| EUV | Extreme ultraviolet |
| MoSi2 | Molybdenum disilicide |
| KOH | Potassium hydroxide |
| TEM | Transmission electron microscopy |
| XRD | X-ray diffraction |
| EUV | Extreme ultraviolet |
| MoSi2 | Molybdenum disilicide |
| KOH | Potassium hydroxide |
| TEM | Transmission electron microscopy |
| XRD | X-ray diffraction |