| CMOS | Complementary Metal-Oxide-Semiconductor |
| CO2 | Carbon Dioxide |
| DRIE | Deep Reactive Ion Etching |
| FEA | Finite Element Analysis |
| FDTD | Finite-Difference Time-Domain |
| IR | Infrared |
| MEMS | Micro-Electro-Mechanical Systems |
| MIM | Metal–Insulator–Metal |
| MOSFET | Metal-Oxide-Semiconductor Field-Effect Transistor |
| PDK | Process-Development-Kit |
| NDIR | Non-Dispersive Infrared |
| SOI | Silicon-On-Insulator |
| WLP | Wafer-Level Vacuum Packaging |
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