Table 1. Thickness and GPC of PEALD and thermal ALD at different temperatures for 1200 ALD cycles.

Temperature	PEALD		Thermal ALD
	Thickness	GPC	Thickness	GPC
200 °C	20 nm	0.17 Å	No deposition	0 Å
300 °C	31 nm	0.26 Å	1.2 nm	0.01 Å
400 °C	31 nm	0.26 Å	12 nm	0.10 Å