Table 2. Thickness and GPC of PEALD and thermal ALD at 400 °C for different no. of ALD cycles. The GPC values reveal distinct growth behaviors: PEALD showed substrate-enhanced growth, while thermal ALD exhibits substrate-inhibited growth.

No. of cycles	PEALD		Thermal ALD
	Thickness	GPC	Thickness	GPC
600	17.7 nm	0.30 Å	5.8 nm	0.10 Å
1200	31.0 nm	0.26 Å	12.0 nm	0.10 Å
2000	50.4 nm	0.27 Å	24.1 nm	0.12 Å