Table 5. ALD process sequence for thermal and PEALD techniques.

ALD process	TiCl4	NH3
	Pulse/purge/flow	Pulse/purge/flow
PEALD	0.1 s/2 s/90 sccm	4.5 s/6 s/80 sccm
Thermal ALD	0.1 s/2 s/60 sccm	0.1 s/2 s/80 sccm