Table 6. Number of ALD cycles and corresponding targeted thickness for PEALD and thermal ALD of TiN films, referenced from previous study61.
| ALD process | Number of cycles | ||
|---|---|---|---|
| 15 (nm) | 30 (nm) | 50 (nm) | |
| PEALD | 600 | 1200 | 2000 |
| Thermal ALD | 1200 | 2000 | 4000 |
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