| CTM | Charge-Trapping Memory |
| CTL | Charge-Trapping Layer |
| RCA | Radio Corporation of America |
| RTA | Rapid Thermal Annealing |
| BE | Binding Energy |
| FWHM | Full Width at Half Maximum |
| VB | Valence Band |
| VBO | Valence Band Offset |
| C-V | Capacitance–Voltage |
| MOS | Metal Oxide Semiconductor |
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