SiC	Silicon Carbide
XPS	X-ray Photoelectron Spectroscopy
SIMS	Secondary Ion Mass Spectrometry
FIB	Focused Ion Beam
TEM	Transmission Electron Microscopy
SAED	Selected Area Electron Diffraction
AFM	Atomic Force Microscopy
ARXPS	Angle-Resolved X-Ray Photoelectron Spectroscopy
FTO	Folded Transverse Optical
LOPC	Longitudinal Optical-Phonon Coupled
FWHM	Full Width at Half Maximum
EV	Electric Vehicle
CMP	Chemical Mechanical Planarization
UV	Ultraviolet