| AE | Acoustic emission signal |
| BBAAT | Flexible ball-end body-armor-like abrasive tool |
| CMP | Chemical mechanical polishing |
| CZT | Cadmium zinc telluride |
| FAP | Fixed abrasive polishing |
| LN | Lithium niobate |
| LT | Lithium tantalite |
| MRD | Material removal depth |
| MRR | Material removal rate |
| Ra | Surface roughness |
| RMS | Root mean square of acoustic emission signal |
| SSD | Subsurface damage depth |
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