AI	Artificial intelligence
ALD	Atomic layer deposition
CTE	Coefficient of thermal expansion
CVD	Chemical vapor deposition
DC	Direct current
EBSD	Electron backscatter diffraction
FEA	Finite element analysis
HPC	High-performance computing
LIDE	Laser-induced deep etching
MEMS	Microelectromechanical systems
PVD	Physical vapor deposition
RF	Radio frequency
SLE	Selective laser etching
TGV	Through-glass via
TSV	Through-silicon via