| MEMSs | micro-electro-mechanical systems |
| CMUTs | capacitive micromachined ultrasonic transducers |
| CV | coefficient of variation |
| PZT | lead zirconate titanate |
| POCUS | point-of-care ultrasound |
| PMUTs | piezoelectric micromachined ultrasonic transducers |
| FEA | finite-element analysis |
| FE | finite element |
| PECVD | plasma-enhanced chemical vapor deposition |
| GP | Gaussian process |
| SDs | standard deviations |
| SNR | signal-to-noise |
| LPCVD | low-pressure chemical vapor deposition |
| RIE | reactive ion etching |
| KOH | potassium hydroxide |
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