Table 2. Sample drifts in X and Y directions for the two stack scans.
| X direction (µm) | Y direction (µm) | |
|---|---|---|
| Sample drift with 0.3 eV steps | 1.138 | 1.079 |
| Sample drift with a 30 eV step | 1.024 | 0.413 |
| Difference (drift due to motor thermal drift) | 0.114 | 0.666 |
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