| AFM | Atomic Force Microscopy |
| ASL | Anti-Sticking Layer |
| DNQ | Diazonaphthoquinone |
| EUV | Extreme Ultraviolet |
| GV | Gray Value |
| LCSM | Laser Confocal Scanning Microscope |
| LER | Line-Edge Roughness |
| PAC | Photoactive Compound |
| PAG | Photoacid Generator |
| TASTE | Thermally Activated Selective Topography Equilibration |
| TIS | Total Integrated Scattering |
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