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Comparison of the tracking error for large-range scanning (32μm). DC denotes the DC-Gain method, INV denotes the proposed inversion-based approach, and emax(%) and erms are the maximum tracking error and RMS tracking error, respectively (see Eq. (15)).
| emax (%) | erms (%) | |||
|---|---|---|---|---|
| Scan Rate (Hz) | DC | INV | DC | INV |
| 5 | 5.9 | 1.12 | 4.25 | 0.60 |
| 30 | 9.0 | 1.14 | 6.20 | 0.64 |
| 50 | 13.1 | 1.46 | 8.30 | 0.73 |
| 90 | 25.5 | 3.51 | 15.2 | 1.73 |
| 150 | 43.1 | 3.36 | 23.8 | 1.67 |
