| AR coating | Antireflection coating |
| SEM | Scanning electron microscopy |
| sccm | Standard cubic centimeter per minute |
| UV-Vis-NIR | Ultraviolet–visible–near-infrared |
| EDS | Energy-dispersive X-ray spectroscopy |
| SD | Standard deviation |
| RSD | Relative standard deviation |
| AR coating | Antireflection coating |
| SEM | Scanning electron microscopy |
| sccm | Standard cubic centimeter per minute |
| UV-Vis-NIR | Ultraviolet–visible–near-infrared |
| EDS | Energy-dispersive X-ray spectroscopy |
| SD | Standard deviation |
| RSD | Relative standard deviation |