| ASG | Above-Surface Growth |
| BSG | Below-Surface Growth |
| CLSM | Confocal Laser Scanning Microscope |
| HSFL | High-Spatial-Frequency Laser-Induced Periodic Surface Structures |
| LIPSS | Laser-Induced Periodic Surface Structures |
| LO | Scanning Line Overlap |
| LSFL | Low-Spatial-Frequency Laser-Induced Periodic Surface Structures |
| MR | (Sub-)Micrometric Ripple(s) |
| NA | Numerical Aperture |
| PVA | Preferential Valley Ablation |
| PO | Laser Pulse Overlap |
| SEM | Scanning Electron Microscope/Scanning Electron Microscopy |
| USPL | Ultrashort-Pulse Laser |
| VLS | Vapor–Liquid–Solid |