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. Author manuscript; available in PMC: 2006 Jul 19.
Published in final edited form as: Rev Sci Instrum. 2006 Feb;77(2):023702-1–023702-9. doi: 10.1063/1.2166509

FIG. 7.

FIG. 7

Tracking system response to 4 nm displacement. QPD signal for three bandwidths of the measurement, i.e., 10 kHz, 1 kHz, and 100 Hz, are shown. dc offsets were added to the 1 and 10 kHz data sets in the figure for clarity.