Table 2.
Summary of mechanical parameters of cantilever beams at various stages of the biosensing analysis, in which protein attachment scheme 1 was used
| Cantilever number | LC, length of cantilever, μm | WC, width, μm | ωr, unloaded natural frequency, MHz | Unloaded quality factor | kC, unloaded linear spring constant, N/m | kC+A, spring constant after composite protein attachment, N/m | ΔωrA, measured change in resonant frequency after composite protein attachment, kHz | Calculated minimum detectable frequency shift to measure composite protein attachment, kHz | ΔωrB, measured change in resonant frequency after virus capture, kHz | Calculated minimum detectable frequency shift to measure virus capture, kHz |
|---|---|---|---|---|---|---|---|---|---|---|
| SE_N1 | 3.1 | 1.7 | 2.407 | 7.28 | 0.0180 | 0.0160 | −376 | 52 | 15 | 50 |
| SE_N6 | 3.0 | 1.7 | 2.161 | 8.38 | 0.0173 | 0.0190 | −236 | 47 | −56 | 38 |
| SE_N7 | 2.8 | 1.8 | 2.439 | 6.25 | 0.0142 | 0.0160 | −87 | 64 | −63 | 54 |
| SE_N2a | 2.8 | 1.6 | 2.237 | 5.88 | 0.0110 | 0.0160 | −179 | 72 | −27 | 45 |
| SE_N3 | 2.9 | 1.6 | 2.246 | 6.32 | 0.0125 | 0.0162 | −123 | 65 | 76 | 47 |
| SE_N4a | 2.5 | 1.6 | 3.242 | 13.05 | 0.0366 | 0.0281 | −233 | 32 | 31 | 38 |
| S5_N1a | 3.4 | 1.5 | 2.633 | 6.11 | 0.0173 | 0.0220 | −97 | 69 | −67 | 51 |
| S5_N2a | 3.3 | 1.5 | 2.751 | 7.70 | 0.0232 | 0.0320 | −195 | 57 | −129* | 35 |
| S5_N4 | 3.3 | 1.4 | 2.146 | 4.89 | 0.0114 | 0.0197 | −233 | 70 | −66* | 31 |
| S5_N6a | 3.1 | 1.4 | 2.930 | 6.87 | 0.0227 | 0.0330 | −223 | 68 | −112* | 39 |
| S5_N2b | 4.3 | 1.5 | 1.227 | 7.95 | 0.0085 | 0.0094 | 112 | 25 | −43 | 27 |
| SE_N4b | 3.1 | 1.8 | 1.831 | 8.05 | 0.0138 | 0.0165 | 82 | 49 | −17 | 44 |
| SE_N5 | 2.8 | 1.6 | 2.363 | 9.77 | 0.0201 | 0.0202 | 324 | 42 | −66 | 49 |
| S5_N5 | 3.3 | 1.4 | 1.767 | 7.23 | 0.0131 | 0.0202 | 55 | 39 | −51 | 27 |
| SE_N2b | 3.2 | 1.7 | 1.933 | 10.17 | 0.0195 | 0.0193 | 108 | 38 | −484* | 41 |
| S5_N1b | 4.3 | 1.3 | 1.278 | 5.92 | 0.0062 | 0.0114 | 81 | 34 | −71* | 22 |
| S5_N3 | 5.0 | 1.5 | 1.264 | 8.23 | 0.0091 | 0.0133 | 132 | 24 | −58* | 21 |
| S5_N5b | 4.5 | 1.5 | 1.256 | 6.28 | 0.0069 | 0.0123 | 633 | 32 | −132* | 45 |
| S5_N6b | 4.5 | 1.7 | 1.309 | 6.57 | 0.0076 | 0.0114 | 49 | 32 | −104* | 23 |
| S5_N7 | 4.7 | 1.3 | 1.300 | 5.91 | 0.0072 | 0.0133 | 28 | 35 | −60* | 20 |
Lengths and widths were obtained through measurements using field emission scanning electron micrographs. Measured changes in resonant frequency after the virus capture step marked with asterisks are two times larger than the calculated minimum detectable frequency shift.