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Reagent delivery machine schematic. Components include (a) the car, (b) the CWs, (c) sets of solenoid valves, (d) the vacuum chuck, (e) the x-table, (f) stack of new masks, (g) the y-table, (h) an air cylinder, (i) a pneumatic gripper, and (j) the stack of new masks. For clarity, the end view focuses on the mask-changing device (i.e., the CW heads are not shown).
