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. Author manuscript; available in PMC: 2008 Apr 24.
Published in final edited form as: Thin Solid Films. 2007 Nov 1;516(1):34–41. doi: 10.1016/j.tsf.2007.04.050

Fig. 12.

Fig. 12

SEM cross-section images of the base, middle and tip part of an electrode from Utah electrode array. a-SiCx:H film thickness measured to be 2.4, 0.75 and 0.55 μm at the tip, middle and base, respectively.