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. Author manuscript; available in PMC: 2008 Apr 24.
Published in final edited form as: Thin Solid Films. 2007 Nov 1;516(1):34–41. doi: 10.1016/j.tsf.2007.04.050

Fig. 9.

Fig. 9

Thickness as a function of soaking time for the sample deposited at 275°C, precursor ratio of 0.17, and hydrogen dilution of 0.36. The overall film thickness (bulk thickness + surface thickness) increased as a function of the soaking time.