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. Author manuscript; available in PMC: 2008 Apr 24.
Published in final edited form as: Thin Solid Films. 2007 Nov 1;516(1):34–41. doi: 10.1016/j.tsf.2007.04.050

Table II.

Absorption peak wavenumber in Infrared spectra versus bonding configuration assignment

Assignment Wavenumber (cm−1) References
Si-C stretching 720–780 [22, 26, 27]
Si-(CH)n wagging rocking 950,1000 [26, 27]
Si-CHn stretching 1250~1350 [26, 27]
Si-H2 and CSi-H stretching 2090 [26, 27]
C-Hn stretching 2800~3000 [26, 27]