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. Author manuscript; available in PMC: 2009 Jan 1.
Published in final edited form as: Sens Actuators A Phys. 2008;145-146(1-2):123–130. doi: 10.1016/j.sna.2007.10.072

Fig. 10.

Fig. 10

SEM micrograph of a saddle shaped electrode array after wet etching. (A) highlights the saddle shaped electrode arrays etched on wafer scale. (B) is zoom-in-view of one electrode array. The electrodes tips form a saddle shape, with corner post and fins at the periphery of the array.