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. Author manuscript; available in PMC: 2009 Jan 1.
Published in final edited form as: Sens Actuators A Phys. 2008;145-146(1-2):123–130. doi: 10.1016/j.sna.2007.10.072

Fig. 12.

Fig. 12

SEM micrograph of electrode array during tip deinsulation. Electrodes tips are exposed in the photoresist, as the photoresist is etched from the tips, Parylene also gets etched. Also shown is magnified image of a single electrode.