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. Author manuscript; available in PMC: 2009 Jan 1.
Published in final edited form as: Sens Actuators A Phys. 2008;145-146(1-2):123–130. doi: 10.1016/j.sna.2007.10.072

Fig. 4.

Fig. 4

The curvature of the surface can be controlled by the depth of dicing saw. (A) dicing depth at the center is less than in (B).This will result in smaller radius of curvature in (A) compared to (B).