FIGURE 2.

Calibration of microfabricated probe with atomic force cantilever. The schematic (dashed lines) depicts deflection of the shearing plate and atomic force cantilever when a radial force was applied to the base of the probe. The schematic is superimposed on an image of the probe and cantilever when no force was applied. The load imposed by the cantilever deflected the flexible arms, so that X_p < X_b. The displacements in this figure are greatly exaggerated for clarity. For calibration in the longitudinal direction, the atomic force cantilever was rotated 90° and placed against a shearing plate edge parallel to the radial axis.