Fig. 3.
Beam-tilt induced image shifts vs. C2 lens current. Measurements were performed at 7 μm defocus, 50,000× nominal magnification, and 4 mrad beam tilt.
Beam-tilt induced image shifts vs. C2 lens current. Measurements were performed at 7 μm defocus, 50,000× nominal magnification, and 4 mrad beam tilt.